Search results for "Glow discharge mass spectroscopy"

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Optical Plasma Diagnostics During Reactive Magnetron Sputtering

2008

Reactive magnetronMaterials science[SPI] Engineering Sciences [physics]Sputteringbusiness.industryOptoelectronicsPlasma diagnosticsOptical emission spectroscopyHigh-power impulse magnetron sputteringbusinessGlow discharge mass spectroscopy

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PEPhysical Sciences and Engineering
- PE2Fundamental Constituents of Matter
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  - PE11_12Semi-conducting and magnetic materials engineering
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LSLife Sciences
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SHSocial Sciences and Humanities
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